Number of zone :One/Two /Three Zone (as per user requirement)
Heating temperature range : Upto1200 C/1400 C
Heating Element: A-1/Silicon Carbide
Temperature accuracy : 1 C
Furnace tube size : ID = 60 mm /OD =65mm/ length= 1200 mm
Quartz tube with couplers :High purity fused quartz
Size:ID =60mm, OD=65mm,length=1200mm
Flanges: Stainless steel 304 flanges on both ends, these are high vacuum flanges with double silicon O ring and metal ring. On one and provision for gas purging through valve and hinge door or ease of placing sample. At other end vacuum KF-25 connection for vacuum pump, KF-10 connection for vacuum gauge and release valve
Heating rate : 15 C per Minute (max.) or user settable Each Hot Zone length : 200 mm length
Display : 7 LCD Touch Screen HMI to control all vital operation of CVD i.e. temperature and gas flow. With Data logging of temperature and gas flow.
Construction : Horizontal and split type
Insulation : Vacuum formed Zirconia fiber
Shell Construction : MS body fabricated from 20/18 gauge sheet, powder coated for superior finish. Double layer body for low surface temp.
Temperature control : ( 1x16=16 segment) PID programmable Digital Temperature controller x 3 no. (separate for each zone)
Temperature sensor : 3 numbers (k type-1200 C/R type-1400 C)
Power control : Through the phase angle controlled SSRUnit/Thyristor Unit
Vacuum pump and gauge : In the range of 10-2 mbar by using Direct of Drive Rotary pump of capacity 200ltr/min with SS bellow andAnalogue Pirani Gauge Range 0.5 mbar to 10-3mbar with sensor having KF-10fitting. (Optional)
Gas purging arrangement
Digital vacuum gauge wih vacuum display upto 10-6 torr.
Gas mixing chamber : One unit kept between the Rotameters and the furnace
Furnace stand to height of 1 meter
Safety: Over current and short current protection,Thermocouple break down alarm, high temperature alarm.
OPTIONAL:-
Chiller with Circulation Pump
Gas Cylinder with Regulator
Mass flow controller for different gases, flow rate upto 500 sccm or as required with digital display (Optional)